Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4614706 | Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching | Toshiharu Matsuzawa, Takao Iwayanagi, Hiroshi Yanazawa, Takahiro Kohashi, Saburo Nonogaki | 1986-09-30 |
| 4536421 | Method of forming a microscopic pattern | Toshiharu Matsuzawa, Takao Iwayanagi, Hiroshi Yanazawa | 1985-08-20 |