Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629462 | Wafer processing system | Masahiro Tsukamoto | 2020-04-21 |
| 10490450 | Electrostatic chuck table | Sakae Matsuzaki, Noriko Ito, Kenji Furuta | 2019-11-26 |
| 10242904 | Transfer apparatus, processing apparatus, and transfer method | Masahiro Tsukamoto | 2019-03-26 |
| 10094951 | Determining apparatus for determining object stored in cassette | Masahiro Tsukamoto | 2018-10-09 |
| 10090186 | Chuck table | — | 2018-10-02 |
| 9517962 | Plate-shaped object processing method | Noboru Takeda, Hiroshi Morikazu, Xiaoming Qiu, Fumiteru Tashino | 2016-12-13 |
| 8404999 | Laser processing apparatus | Keiji Nomaru, Hiroshi Morikazu | 2013-03-26 |
| 6494197 | Dicing machine for cutting CSP plate into pellets | Eiichi Yoshimura, Shinichi Namioka | 2002-12-17 |
| 5521495 | Sensor for contactless determination of an angle of rotation of a rotatable structural element | Hajime Takahashi, Wataru Nagasaki, Kazuhiko Shimoda | 1996-05-28 |