Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387915 | Lower plasma exclusion zone ring for bevel etcher | Jack Chen, Gregory Sexton | 2025-08-12 |
| 10832923 | Lower plasma-exclusion-zone rings for a bevel etcher | Tong Fang, Yunsang Kim, George Stojakovic | 2020-11-10 |
| 10811282 | Upper plasma-exclusion-zone rings for a bevel etcher | Tong Fang, Yunsang Kim, George Stojakovic | 2020-10-20 |
| 10748747 | Edge exclusion control with adjustable plasma exclusion zone ring | Yunsang Kim | 2020-08-18 |
| 10629458 | Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter | Tong Fang, Yunsang Kim, George Stojakovic | 2020-04-21 |
| 9799496 | Edge exclusion control with adjustable plasma exclusion zone ring | Yansung Kim | 2017-10-24 |
| 9184030 | Edge exclusion control with adjustable plasma exclusion zone ring | Yansung Kim | 2015-11-10 |
| 8852384 | Method and apparatus for detecting plasma unconfinement | Yunsang Kim, Andrew D. Bailey, III | 2014-10-07 |
| 8398778 | Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter | Tong Fang, Yunsang Kim, George Stojakovic | 2013-03-19 |
| 8257503 | Method and apparatus for detecting plasma unconfinement | Yunsang Kim, Andrew D. Bailey, III | 2012-09-04 |
| 8137501 | Bevel clean device | Yunsang Kim, Andrew D. Bailey, III, Greg Sexton, Andras Kuthi | 2012-03-20 |