Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869002 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Dario L. Goldfarb | 2011-01-11 |
| 7782445 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Dario L. Goldfarb | 2010-08-24 |