Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049976 | Thin-film transistor, oxide semiconductor film, and sputtering target | Mitsuru Ueno, Motoshi KOBAYASHI, Masaki Takei, Kazutoshi Takahashi, Koji Hidaka +3 more | 2021-06-29 |
| 8460522 | Method of forming thin film and apparatus for forming thin film | Yuichi Oishi, Takashi Komatsu, Makoto Arai | 2013-06-11 |
| 8221594 | Magnetron sputtering apparatus and magnetron sputtering method | Yasuhiko Akamatsu, Kyuzo Nakamura, Motoshi KOBAYASHI, Tomiyuki YUKAWA, Masaki Takei +3 more | 2012-07-17 |
| 8172993 | Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode | Yasuhiko Akamatsu, Tatsunori Isobe, Makoto Arai, Takashi Komatsu | 2012-05-08 |
| 7347919 | Sputter source, sputtering device, and sputtering method | Shigemitsu Sato, Masasuke Matsudai, Hiroki Oozora, Hajime Nakamura, Satoru Ishibashi +1 more | 2008-03-25 |