Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8172993 | Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode | Yasuhiko Akamatsu, Makoto Arai, Junya Kiyota, Takashi Komatsu | 2012-05-08 |