Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935936 | Aluminum alloy film, method of producing the same, and thin film transistor | Yuusuke Ujihara, Motoshi KOBAYASHI, Tomohiro Nagata, Ryouta Nakamura, Junichi Nitta +1 more | 2024-03-19 |
| 8221594 | Magnetron sputtering apparatus and magnetron sputtering method | Kyuzo Nakamura, Motoshi KOBAYASHI, Junya Kiyota, Tomiyuki YUKAWA, Masaki Takei +3 more | 2012-07-17 |
| 8172993 | Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode | Tatsunori Isobe, Makoto Arai, Junya Kiyota, Takashi Komatsu | 2012-05-08 |
| 7863125 | Manufacturing method of CMOS type semiconductor device, and CMOS type semiconductor device | Shimpei Tsujikawa, Hiroshi Umeda, Jiro Yugami, Masaharu Mizutani, Masao Inoue +2 more | 2011-01-04 |
| 7569890 | Manufacturing method of CMOS type semiconductor device, and CMOS type semiconductor device | Shimpei Tsujikawa, Hiroshi Umeda, Jiro Yugami, Masaharu Mizutani, Masao Inoue +2 more | 2009-08-04 |