SS

Shigemitsu Sato

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #3,351,479 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7347919 Sputter source, sputtering device, and sputtering method Masasuke Matsudai, Hiroki Oozora, Junya Kiyota, Hajime Nakamura, Satoru Ishibashi +1 more 2008-03-25