Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7115531 | Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices | Edward O. Shaffer, II, Kevin E. Howard, Jack E. Hetzner, Paul H. Townsend, III, Lynne K. Mills +2 more | 2006-10-03 |
| 7042091 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Gilbert Declerck | 2006-05-09 |
| 6815333 | Tri-layer masking architecture for patterning dual damascene interconnects | Paul H. Townsend, III, Lynne K. Mills, Richard J. Strittmatter | 2004-11-09 |
| 6271135 | Method for forming copper-containing metal studs | Roger Palmans, Gibert Declerck | 2001-08-07 |
| 6245489 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Gilbert Declerck | 2001-06-12 |