Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8703249 | Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system | Eric H. Lenz | 2014-04-22 |
| 8628675 | Method for reduction of voltage potential spike during dechucking | Brian McMillin, Yen-Kun Wang | 2014-01-14 |
| 8313612 | Method and apparatus for reduction of voltage potential spike during dechucking | Brian McMillin, Yen-Kun Wang | 2012-11-20 |
| 7867356 | Apparatus for reducing polymer deposition on a substrate and substrate support | Eric H. Lenz | 2011-01-11 |
| 7252738 | Apparatus for reducing polymer deposition on a substrate and substrate support | Eric H. Lenz | 2007-08-07 |
| 7093560 | Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system | Eric H. Lenz | 2006-08-22 |