Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9915621 | Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof | Majeed A. Foad, Christopher Dennis Bencher, Christopher G. Talbot | 2018-03-13 |
| 6698991 | Fabrication system with extensible equipment sets | Robert Z. Bachrach | 2004-03-02 |
| 6605319 | Use of integrated polygen deposition and RTP for microelectromechanical systems | Jeffrey D. Chinn, Yi-Hsing Chen, Robert Z. Bachrach | 2003-08-12 |
| 5986747 | Apparatus and method for endpoint detection in non-ionizing gaseous reactor environments | — | 1999-11-16 |