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Jinyan Song

KL Kla: 1 patents #347 of 758Top 50%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11360398 System and method for tilt calculation based on overlay metrology measurements Roie Volkovich, Paul MacDonald, Ady Levy, Jincheng Pei, Amnon Manassen 2022-06-14