Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866821 | Substrate support cover for high-temperature corrosive environment | Shuran Sheng, Lin Zhang, Joseph C. Werner, Stanley Wu, Mahesh Adinath Kanawade +3 more | 2024-01-09 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jang Seok OH, Joseph C. Werner, Nitin Khurana +4 more | 2023-12-05 |
| 10684250 | Method for making polymer single nanowires and sensors utilizing the same | Minhee Yun, David Schwartzman | 2020-06-16 |
| 9347939 | Method for making polymer single nanowires and sensors utilizing the same | Minhee Yun, David Schwartzman | 2016-05-24 |