Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9950923 | Method for making vias using a doped substrate | Christopher S. Gudeman | 2018-04-24 |
| 9493877 | Etching technique for microfabrication substrates | John C. Harley, Tao Gilbert | 2016-11-15 |
| 9388037 | Device using glass substrate anodic bonding | Benedikt Zeyen | 2016-07-12 |
| 9315375 | Method using glass substrate anodic bonding | Benedikt Zeyen | 2016-04-19 |
| 9156679 | Method and device using silicon substrate to glass substrate anodic bonding | Benedikt Zeyen | 2015-10-13 |
| 8847373 | Exothermic activation for high vacuum packaging | Christopher S. Gudeman, Jaquelin K. Spong | 2014-09-30 |
| 8558364 | Inductive getter activation for high vacuum packaging | — | 2013-10-15 |
| 8541735 | Inlaid optical material and method of manufacture | John S. Foster, John C. Harley, Ian R. Johnston | 2013-09-24 |
| 8343791 | Plating process and apparatus for through wafer features | John S. Foster, John C. Harley | 2013-01-01 |
| 7960208 | Wafer level hermetic bond using metal alloy with raised feature | Gregory A. Carlson, David M. Erlach, Alok Paranjpye | 2011-06-14 |
| 7872432 | MEMS thermal device with slideably engaged tether and method of manufacture | Alok Paranjpye | 2011-01-18 |
| 7807547 | Wafer bonding material with embedded rigid particles | — | 2010-10-05 |
| 7759218 | Indented lid for encapsulated devices and method of manufacture | — | 2010-07-20 |
| 7687304 | Current-driven device using NiMn alloy and method of manufacture | Gregory A. Carlson, Alok Paranjpye, Douglas L. Thompson | 2010-03-30 |
| 7582969 | Hermetic interconnect structure and method of manufacture | Gregory A. Carlson | 2009-09-01 |
| 7569926 | Wafer level hermetic bond using metal alloy with raised feature | Gregory A. Carlson, David M. Erlach, Alok Paranjpye | 2009-08-04 |
| 7462931 | Indented structure for encapsulated devices and method of manufacture | — | 2008-12-09 |
| 7141080 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, John S. Foster, Richard Martin, Paul J. Rubel, John W. Stocker +1 more | 2006-11-28 |
| 7057245 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Andrew Wallis, Paul J. Rubel, John S. Foster +1 more | 2006-06-06 |
| 6831380 | Low inertia latching microactuator | Tara Jean Rybnicek, John W. Stocker, John S. Foster, Richard Martin, Paul J. Rubel +1 more | 2004-12-14 |
| 6812061 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Andrew Wallis, Paul J. Rubel, John S. Foster +1 more | 2004-11-02 |
| 6801681 | Optical switch with low-inertia micromirror | Patrick Edward Feierabend, John S. Foster, Bryant P. Hichwa, Richard Martin, Paul J. Rubel +2 more | 2004-10-05 |
| 6785038 | Optical cross-connect with magnetic micro-electro-mechanical actuator cells | Bryant P. Hichwa, John S. Foster, Richard Martin, Paul J. Rubel, John W. Stocker | 2004-08-31 |