Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10590536 | Apparatus, method and reaction chamber | Mikko Soderlund, Pekka Soininen | 2020-03-17 |
| 10167551 | Apparatus, method and reaction chamber | Mikko Soderlund, Pekka Soininen | 2019-01-01 |
| 9892814 | Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same | — | 2018-02-13 |
| 9290840 | Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same | — | 2016-03-22 |
| 8945676 | Method and apparatus for coating | — | 2015-02-03 |
| 8367561 | Method in depositing metal oxide materials | Kari Harkonen | 2013-02-05 |
| 7901736 | Multilayer material and method of preparing same | Kari Harkonen, Anguel Nikolov | 2011-03-08 |
| 7294360 | Conformal coatings for micro-optical elements, and method for making the same | Runar Törnqvist | 2007-11-13 |
| 7191793 | Diaphragm valve for atomic layer deposition | Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2007-03-20 |
| 7141095 | Precursor material delivery system for atomic layer deposition | Bradley J. Aitchison, Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Harkonen +1 more | 2006-11-28 |
| 7021330 | Diaphragm valve with reliability enhancements for atomic layer deposition | Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2006-04-04 |
| 6941963 | High-speed diaphragm valve for atomic layer deposition | Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2005-09-13 |
| 6907897 | Diaphragm valve for high-temperature precursor supply in atomic layer deposition | Hannu Leskinen, Teemu Lang, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison | 2005-06-21 |