Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8500382 | Airflow management for particle abatement in semiconductor manufacturing equipment | Tent-Chao D. Tao, Erin Madden, Donald N. Polner | 2013-08-06 |
| 6578893 | Apparatus and methods for handling semiconductor wafers | Alan Soucy | 2003-06-17 |