Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7865130 | Material processing apparatus, material processing method, and material processing program product | Toshiya Koyama, Nobuhiro Nozaki | 2011-01-04 |
| 7573054 | Edge exposure apparatus, coating and developing apparatus, and edge exposure method | Yasuharu Iwashita | 2009-08-11 |
| 6864971 | System and method for performing optical inspection utilizing diffracted light | Youling Lin, A. Kathleen Hennessey, Yongqiang Liu, Yonghang Fu, Masami Yamashita | 2005-03-08 |