| 10790114 |
Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages |
Christopher Sears, Hedong Yang, Thanh Huy Ha, Jianwei Wang, Huina Xu |
2020-09-29 |
| 8921782 |
Tilt-imaging scanning electron microscope |
Xinrong Jiang, Christopher Sears, Liqun Han |
2014-12-30 |
| 6188167 |
Micro electron beam source and a fabrication process thereof |
Yasuhiro Endo, Shunji Goto |
2001-02-13 |
| 6130429 |
Miniaturized secondary electron detector |
Takayuki Ambe |
2000-10-10 |
| 5731228 |
Method for making micro electron beam source |
Yasuhiro Endo, Shunji Goto |
1998-03-24 |
| 5557105 |
Pattern inspection apparatus and electron beam apparatus |
Kenji Sugishima, Masaki Yamabe |
1996-09-17 |
| 5430292 |
Pattern inspection apparatus and electron beam apparatus |
Kenji Sugishima, Masaki Yamabe |
1995-07-04 |
| 5384463 |
Pattern inspection apparatus and electron beam apparatus |
Kenji Sugishima, Masaki Yamabe |
1995-01-24 |
| 4789786 |
Method of projecting photoelectron image |
Hiroshi Yasuda |
1988-12-06 |
| 4748646 |
X-ray lithography system |
Toshihiko Osada, Kenji Sugishima |
1988-05-31 |
