Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11490499 | Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same | Sungho Jang, Yoonjae Kim, Donghyub Lee, Kul Inn | 2022-11-01 |
| 11217495 | X-ray system, semiconductor package, and tray having X-ray absorption filter | Sang-Young Kim, Kyung-Soo Rho, Ho-Jeong Moon, SUN-NYEONG JUNG | 2022-01-04 |
| 11109474 | Extreme ultraviolet generation apparatus | In Ho Choi, Min Seok Choi, Jeong Gil Kim, In Jae Lee, Sung Ho JANG | 2021-08-31 |
| 11016400 | Extreme ultraviolet exposure system | Sungho Jang, Sungyeol Kim, Keunhee Bai, Injae Lee | 2021-05-25 |
| 9728293 | X-ray system, semiconductor package, and tray having X-ray absorption filter | Sang-Young Kim, Kyung-Soo Rho, Ho-Jeong Moon, SUN-NYEONG JUNG | 2017-08-08 |