Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Masakazu Minami, Yuhei SAKAGUCHI | 2021-02-23 |
| 10747239 | Fluid control device, fluid control method, and program recording medium recorded with program for fluid control device | — | 2020-08-18 |
| 10138555 | Gas control system and program for gas control system | Kotaro Takijiri, Masakazu Minami, Atsuko Teraoka | 2018-11-27 |
| 6752387 | Method and an apparatus for mixing and gasifying a reactant gas-liquid mixture | Hideaki Miyamoto | 2004-06-22 |
| 6464782 | Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications | Visweswaren Sivaramakrishnam, Jun Zhao, Ichiro Yokoyama | 2002-10-15 |
| 5645642 | Method for in-situ liquid flow rate estimation and verification | Visweswaren Sivaramakrishnan, Jun Zhao | 1997-07-08 |
| 5531183 | Vaporization sequence for multiple liquid precursors used in semiconductor thin film applications | Visweswaren Sivaramakrishnam, Jun Zhao, Ichiro Yokoyama | 1996-07-02 |
| 5520969 | Method for in-situ liquid flow rate estimation and verification | Visweswaren Sivaramakrishnan, Jun Zhao | 1996-05-28 |
| 5440887 | Liquid vaporizer-feeder | Hirofumi Ono | 1995-08-15 |
| 5419924 | Chemical vapor deposition method and apparatus therefore | Makoto Nagashima, Hirofumi Ono | 1995-05-30 |
| 5272880 | Liquid vaporizer-feeder | Hirofumi Ono | 1993-12-28 |
| 5203925 | Apparatus for producing a thin film of tantalum oxide | Munehiro Shibuya, Masatoshi Kitagawa, Takeshi Kamada, Takashi Hirao | 1993-04-20 |
| 4879487 | Surface-acoustic-wave device | Kazuyoshi Sugai, Kiyotaka Sato | 1989-11-07 |