Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217986 | Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2025-02-04 |
| 10290521 | Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu | 2019-05-14 |
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2017-06-27 |
| 9368383 | Substrate treating apparatus with substrate reordering | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2016-06-14 |
| 9299596 | Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2016-03-29 |
| 9230834 | Substrate treating apparatus | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu | 2016-01-05 |
| 9184071 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2015-11-10 |
| 9174235 | Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu | 2015-11-03 |
| 9165807 | Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu | 2015-10-20 |
| 8851008 | Parallel substrate treatment for a plurality of substrate treatment lines | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu | 2014-10-07 |
| 8708587 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Kenya Morinishi, Tsuyoshi Mitsuhashi, Yasuo Kawamatsu, Yoshiteru Fukutomi | 2014-04-29 |
| 8545118 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu | 2013-10-01 |