| 10042151 |
Interference objective lens and reference surface unit set |
— |
2018-08-07 |
| D666513 |
Remote probe for a coordinate measuring machine |
Sadayuki Matsumiya, Yu Sugai, Shigeru Ohtani, Shinichiro Aoyagi, Hitoshi Isobe |
2012-09-04 |
| 6633387 |
Method and apparatus for measuring opposite surfaces |
Kiyokazu Okamoto, Ikumatsu Fujimoto, Naoki Mitsutani |
2003-10-14 |
| 6507404 |
Method and apparatus for measuring optical wavelength |
Nobuhisa Nishioki, Nobuhiro Ishikawa |
2003-01-14 |
| 6496269 |
Shape measuring apparatus |
Naoki Mitsutani, Kazuhiko Kawasaki, Hiroshi Haino |
2002-12-17 |
| 6147764 |
Optical interference profiler having shadow compensation |
— |
2000-11-14 |
| 5999264 |
On-the-fly optical interference measurement device, machining device provided with the measurement device, and machine tool suited to on-the-fly optical measurement |
— |
1999-12-07 |