Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658204 | Spin chuck with concentrated center and radial heating | Bridget Hill, Michael PUGGL, Gerhard Mueller, Karl-Heinz Hohenwarter, Ulrich Tschinderle +1 more | 2020-05-19 |