Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8772682 | Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber | Uwe Haller, Jianhua Zhou | 2014-07-08 |
| 8698889 | Metrology system for imaging workpiece surfaces at high robot transfer speeds | Abraham Ravid, Todd Egan, Karen Lingel, Mitchell DiSanto, Edward W. Budiarto | 2014-04-15 |
| 8552346 | Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber | Uwe Haller, Jianhua Zhou | 2013-10-08 |