Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803276 | Method and apparatus for producing low-particle layers on substrates | Michael Vergöhl, Daniel Rademacher, Hans-Ulrich Kricheldorf | 2017-10-31 |
| 6814839 | Interference layer system | Joachim Szczyrbowski | 2004-11-09 |
| 6451178 | Interference layer system | Joachim Szczyrbowski | 2002-09-17 |
| 6241824 | Apparatus for the coating of substrates in a vacuum chamber | Hermann Kloberdanz, Hans-Georg Lotz, Jochen Schneider, Alfons Zoller, Harro Hagedorn +3 more | 2001-06-05 |
| 5900065 | Apparatus for the plasma-chemical deposition of polycrystalline diamond | Michael Liehr, Claus-Peter Klages | 1999-05-04 |
| 5718815 | Apparatus for coating a substrate from an electrically conductive target | Joachim Szczyrbowski, Gotz Teschner | 1998-02-17 |
| 5688388 | Apparatus for coating a substrate | Martin Bahr, Erwin Winter | 1997-11-18 |
| 5372693 | Vacuum coating apparatus | Ulrich Patz, Michael Scherer, Joachim Szczyrbowski | 1994-12-13 |