Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217947 | Method and device for producing uniform films on moving substrates and films produced in this way | Michael Vergöhl, Tobias Zickenrott | 2025-02-04 |
| 9803276 | Method and apparatus for producing low-particle layers on substrates | Michael Vergöhl, Hans-Ulrich Kricheldorf, Gunter Brauer | 2017-10-31 |