| 12315710 |
Plasma diagnosis system and plasma diagnosis method |
Bum Su On, Yeon Su Park |
2025-05-27 |
| 10964515 |
Plasma diagnostic system and method |
Gi Won Shin, Hwan Hee Lee |
2021-03-30 |
| 9162179 |
Apparatus for decomposing perfluorocarbon and harmful gas using high-density confined plasma source |
Jin Hee HONG |
2015-10-20 |
| 8674209 |
Thin film type solar cell and method for manufacturing the same |
Jin Woo Hong, Chang Sil Yang |
2014-03-18 |
| 8460469 |
Apparatus for etching substrate and method of etching substrate using the same |
Joung-Sik Kim, Jin Hee HONG |
2013-06-11 |
| 8035056 |
Plasma generation apparatus |
Sang Won Lee, Sae-Hoon Uhm, Jae-Hyun Kim, Bo-Han Hong, Yong Kwan Lee |
2011-10-11 |
| 7465672 |
Method of forming etching mask |
Nae Eung Lee, Chang Ki Park, Chun-Hee Lee, Duck Ho KIM |
2008-12-16 |
| 7442273 |
Apparatus using hybrid coupled plasma |
Hong-Young Chang, Yong Kwan Lee |
2008-10-28 |
| 7411148 |
Plasma generation apparatus |
Sang Won Lee, Sae-Hoon Uhm, Jae-Hyun Kim, Bo-Han Hong, Yong Kwan Lee |
2008-08-12 |
| 6847516 |
Electrostatic chuck for preventing an arc |
Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more |
2005-01-25 |
| 6770836 |
Impedance matching circuit for inductively coupled plasma source |
Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more |
2004-08-03 |
| 6768269 |
Plasma process chamber monitoring method and system used therefor |
Hong-Sik Byun, Young Suk Lee |
2004-07-27 |
| 6685800 |
Apparatus for generating inductively coupled plasma |
Hong-Seub Kim, Sun-Seok Han, Choong-Won Lee, Sung-Weon Lee, Hong-Sik Byun |
2004-02-03 |
| 6683274 |
Wafer susceptor |
Soo-Sik Yoon, Hong-Sik Byun |
2004-01-27 |
| 6653988 |
Parallel resonance whirl antenna |
Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more |
2003-11-25 |