Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6847516 | Electrostatic chuck for preventing an arc | Gi-Chung Kwon, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more | 2005-01-25 |
| 6770836 | Impedance matching circuit for inductively coupled plasma source | Gi-Chung Kwon, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more | 2004-08-03 |
| 6768269 | Plasma process chamber monitoring method and system used therefor | Gi-Chung Kwon, Young Suk Lee | 2004-07-27 |
| 6685800 | Apparatus for generating inductively coupled plasma | Hong-Seub Kim, Gi-Chung Kwon, Sun-Seok Han, Choong-Won Lee, Sung-Weon Lee | 2004-02-03 |
| 6683274 | Wafer susceptor | Gi-Chung Kwon, Soo-Sik Yoon | 2004-01-27 |
| 6653988 | Parallel resonance whirl antenna | Gi-Chung Kwon, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more | 2003-11-25 |