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Inductive coil structure and inductively coupled plasma generation system |
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Power supply and method of supplying power to load |
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2024-02-20 |
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Plasma generating apparatus and method for operating same |
Yun Seong Lee, Yeong-Hoon SOHN, Se-Hong Park |
2023-10-17 |
| 11632061 |
Power supply and method of supplying power to load |
Yeong-Hoon SOHN, Se-Hong Park |
2023-04-18 |
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Plasma generating apparatus and method for operating same |
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2022-12-20 |
| 11521829 |
Inductive coil structure and inductively coupled plasma generation system |
Yun Seong Lee |
2022-12-06 |
| 11290028 |
Power supply and method of supplying power to load |
Yeong-Hoon SOHN, Se-Hong Park |
2022-03-29 |
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Power supply and method of supplying power to load |
Yeong-Hoon SOHN, Se-Hong Park |
2022-02-22 |
| 10903046 |
Inductive coil structure and inductively coupled plasma generation system |
Yun Seong Lee |
2021-01-26 |
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Inductive coil structure and inductively coupled plasma generation system |
Yun Seong Lee |
2021-01-19 |
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Inductive coil structure and inductively coupled plasma generation system |
Yun Seong Lee |
2020-01-21 |
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Plasma generation apparatus and plasma generation method |
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2018-05-01 |
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Plasma generation apparatus |
Gi-Chung Kwon, Sang Won Lee, Jae-Hyun Kim, Bo-Han Hong, Yong Kwan Lee |
2011-10-11 |
| 7411148 |
Plasma generation apparatus |
Gi-Chung Kwon, Sang Won Lee, Jae-Hyun Kim, Bo-Han Hong, Yong Kwan Lee |
2008-08-12 |
| 7088047 |
Inductively coupled plasma generator having low aspect ratio |
Yong Kwan Lee, Won-Bong Jung, Sang Won Lee, Dong-Seok Lee |
2006-08-08 |
| 7079085 |
Antenna structure for inductively coupled plasma generator |
Young Kwan Lee, Sang Won Lee |
2006-07-18 |