Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403508 | Liquid chemical supply module and substrate processing apparatus including the same | Seungtae YANG, Sangwoo PARK, Youngjoon Han, Seonghyeon Kim | 2025-09-02 |
| 11869778 | Liquid supply unit, and apparatus and method for processing substrate | Seungtae YANG, Buyoung Jung, Gui Su PARK | 2024-01-09 |
| 11658048 | Unit for supplying liquid, apparatus and method for treating substrate having the unit | Seong-soo Lee, Buyoung Jung, Myung A JEON, Soo Young Park | 2023-05-23 |