Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5118378 | Apparatus for detecting an end point of etching | Tatsuo Moroi, Keiji Tada, Noriaki Yamamoto, Tetsunori Kaji, Yuzou Ohhirabaru | 1992-06-02 |
| 4615761 | Method of and apparatus for detecting an end point of plasma treatment | Keiji Tada, Takashi Fujii, Kazuhiro Jyouo, Takahiro Fujisawa | 1986-10-07 |
| 4563240 | Method and apparatus for plasma process | Fumio Shibata, Katsuaki Nagatomo, Hidetomo Fukuhara, Sadayuki Okudaira | 1986-01-07 |