Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8679252 | Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof | Hong Shih, Daxing Ren | 2014-03-25 |
| 8287656 | Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus | Cristian Paduraru, Katrina Mikhaylich | 2012-10-16 |
| 8051863 | Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus | Cristian Paduraru, Katrina Mikhaylich | 2011-11-08 |