FC

Fuping Chen

A( Acm Research (Shanghai): 30 patents #3 of 43Top 7%
AR Acm Research: 5 patents #2 of 14Top 15%
Overall (All Time): #95,223 of 4,157,543Top 3%
35
Patents All Time

Issued Patents All Time

Showing 1–25 of 35 patents

Patent #TitleCo-InventorsDate
12334367 Method and apparatus for removing particles or photoresist on substrates Xiaoyan Zhang, Wenjun Wang, Jun Wang, Shena Jia, Deyun Wang +3 more 2025-06-17
12186684 Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device Hui Wang, Xi Wang, Shena Jia, Danying Wang, Chaowei Jiang +2 more 2025-01-07
12111575 Coater with automatic cleaning function and coater automatic cleaning method Hui Wang, Wenjun Wang, Hongchao Yang, Voha Nuch, Fufa Chen +3 more 2024-10-08
12100586 Substrate cleaning method and apparatus Wenjun Wang, Ting YAO, Xiaoyan Zhang, Hui Wang 2024-09-24
12068149 Apparatus and method for cleaning semiconductor wafers Hui Wang, Zhiyou Fang, Jun Wu, Guanzhong Lu, Jian Wang +2 more 2024-08-20
12062556 Methods and apparatus for cleaning semiconductor wafers Xiaoyan Zhang, Hui Wang 2024-08-13
11967497 Methods and apparatus for cleaning semiconductor wafers Jun Wang, Hui Wang, Fufa Chen, Jian Wang, Xi Wang +5 more 2024-04-23
11955328 Method and apparatus for cleaning semiconductor wafer Hui Wang, Xi Wang 2024-04-09
11925881 Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device Hui Wang, Xi Wang, Shena Jia, Danying Wang, Chaowei Jiang +2 more 2024-03-12
11911807 Method and apparatus for cleaning substrates Hui Wang, Xi Wang, Xiaoyan Zhang, Fufa Chen 2024-02-27
11911808 System for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2024-02-27
11876005 Methods and apparatus for cleaning flip chip assemblies Xiaoyan Zhang, Hui Wang 2024-01-16
11854842 Substrate heat treatment apparatus Hui Wang, Hongchao Yang, Jun Wu, Wenjun Wang, Zhiyou Fang 2023-12-26
11848217 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fufa Chen, Jian Wang, Xiaoyan Zhang +4 more 2023-12-19
11752529 Method for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-09-12
11638937 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fufa Chen, Jian Wang, Xiaoyan Zhang +4 more 2023-05-02
11633765 System for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-04-25
11629425 Method and apparatus for uniformly metallization on substrate Hui Wang, Xi Wang 2023-04-18
11581205 Methods and system for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-02-14
11498100 Apparatus for cleaning semiconductor substrates Hui Wang, Xiaofeng Tao, Shena Jia, Xi Wang, Xiaoyan Zhang +1 more 2022-11-15
11462423 Method and apparatus for cleaning semiconductor wafer Hui Wang, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang 2022-10-04
11335550 Method and apparatus for cleaning semiconductor wafer Hui Wang, Xi Wang 2022-05-17
11257667 Methods and apparatus for cleaning semiconductor wafers Jun Wang, Hui Wang, Fufa Chen, Jian Wang, Xi Wang +5 more 2022-02-22
11141762 System for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2021-10-12
11103898 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fufa Chen, Jian Wang, Xiaoyan Zhang +4 more 2021-08-31