Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9089007 | Method and apparatus for substrate support with multi-zone heating | Yao-Hung YANG, Jeonghoon Oh, Tom K. Cho, Tao Hou | 2015-07-21 |
| 8911151 | Substrate support bushing | Tao Hou, Jeonghoon Oh, Tom K. Cho, Andrzej Matlosz, Yao-Hung YANG | 2014-12-16 |
| 6685799 | Variable efficiency faraday shield | Matthew F. Davis | 2004-02-03 |