| 11823890 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2023-11-21 |
| 11712745 |
Semiconductor substrate support with multiple electrodes and method for making same |
Michael Parker, Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex +1 more |
2023-08-01 |
| 11495450 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2022-11-08 |
| 11222804 |
Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same |
Brent Donald Alfred Elliot, Michael Parker, Jason Stephens, Guleid Hussen |
2022-01-11 |
| 11091397 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2021-08-17 |
| 10991616 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2021-04-27 |
| 10646941 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2020-05-12 |
| 10593584 |
Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same |
Brent Donald Alfred Elliot, Michael Parker, Jason Stephens, Guleid Hussen |
2020-03-17 |
| 10287215 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2019-05-14 |
| 10213858 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2019-02-26 |
| 10153183 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2018-12-11 |
| 9999947 |
Method for repairing heaters and chucks used in semiconductor processing |
Brent Donald Alfred Elliot, Alexander Veytser, Michael Parker, JEFF CUNHA |
2018-06-19 |
| 9984866 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2018-05-29 |
| 9624137 |
Low temperature method for hermetically joining non-diffusing ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2017-04-18 |
| 9556074 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2017-01-31 |
| 9315424 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2016-04-19 |
| 8932690 |
Plate and shaft device |
Alfred Grant Elliot, Dennis George Rex, Alexander Veytser, Brent Donald Alfred Elliot, Richard Erich Schuster |
2015-01-13 |
| 8789743 |
Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veytser |
2014-07-29 |
| 8684256 |
Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Richard Erich Schuster, Dennis George Rex, Alexander Veyster |
2014-04-01 |
| 7098428 |
System and method for an improved susceptor |
Brent Donald Alfred Elliot, Alexander Veytser, Benjamin D. Mosser, Harold Mortensen |
2006-08-29 |
| 5605179 |
Integrated gas panel |
Benjamin R. Strong, Jr., Brent Donald Alfred Elliot |
1997-02-25 |
| 5178651 |
Method for purifying gas distribution systems |
Brent Donald Alfred Elliot |
1993-01-12 |