Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8309464 | Methods for etching the edge of a silicon wafer | Henry F. Erk, Peter Albrecht, Thomas E. Doane, Judith A. Schmidt, Roland R. Vandamme +1 more | 2012-11-13 |
| 8192822 | Edge etched silicon wafers | Henry F. Erk, Peter Albrecht, Thomas E. Doane, Judith A. Schmidt, Roland R. Vandamme +1 more | 2012-06-05 |
| 5816274 | Apparartus for cleaning semiconductor wafers | Ronald D. Bartram | 1998-10-06 |
| 5626159 | Apparatus for cleaning semiconductor wafers | Henry F. Erk, Ronald D. Bartram, Jing Chai | 1997-05-06 |
| 5593505 | Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface | Henry F. Erk, Ronald D. Bartram, Jing Chai | 1997-01-14 |