Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8913120 | Method for emulation of a photolithographic process and mask inspection microscope for performing the method | Thomas Scherübl, Rigo Richter, Arne Seyfarth | 2014-12-16 |
| 7049034 | Photomask having an internal substantially transparent etch stop layer | Patrick M. Martin, Matthew Lassiter, Darren Taylor, Michael Jerome Cangemi | 2006-05-23 |