Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5800626 | Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates | Susan L. Cohen, Klaus Penner, David L. Rath, Kamalesh K. Srivastava | 1998-09-01 |