Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420315 | Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing system having the same | — | 2025-09-23 |
| 11735438 | Methods and apparatus for Marangoni drying | Jagan Rangarajan | 2023-08-22 |
| 11710648 | Drying environments for reducing substrate defects | Jim K. Atkinson | 2023-07-25 |
| 11430672 | Drying environments for reducing substrate defects | Jim K. Atkinson | 2022-08-30 |
| 9352471 | Substrate gripper apparatus and methods | Gee Sun Hoey, Jim K. Atkinson | 2016-05-31 |
| 8869422 | Methods and apparatus for marangoni substrate drying using a vapor knife manifold | Allen L. D'Ambra, Jim K. Atkinson | 2014-10-28 |