ES

Ed Santos

Lam Research: 2 patents #1,015 of 2,128Top 50%
Overall (All Time): #2,055,638 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8797705 Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential John C. Valcore, Jr., Saurabh Ullal, Daniel Sang Byun, Konstantin Makhratchev 2014-08-05
8440061 System and method for plasma arc detection, isolation and prevention John C. Valcore, Jr. 2013-05-14