EM

Ed Ma

KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
Overall (All Time): #3,140,112 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8917432 Multiplexing EUV sources in reticle inspection Daniel Wack, Daimian Wang, Karl R. Umstadter, Frank Chilese 2014-12-23