Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7262837 | Noninvasive method for characterizing and identifying embedded micropatterns | Pierre-Yves Guittet, Ulrich Mantz | 2007-08-28 |
| 6935201 | Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations | Michael Abraham | 2005-08-30 |
| 6914006 | Wafer scribing method and wafer scribing device | Martin Peiter, Karl Mautz | 2005-07-05 |
| 6866200 | Semiconductor device identification apparatus | Martin Peiter | 2005-03-15 |
| 6745637 | Self-supporting adaptable metrology device | Volker Tegeder, Detlef Gerhard, Johannes Lechner | 2004-06-08 |
| 6261382 | Wafer marking | Detlef Gerhard, Steffen Franke | 2001-07-17 |
| 6147321 | Configuration for the automatic inscription or reinscription of wafers | Detlef Gerhard, Jens Müller | 2000-11-14 |