Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7201803 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Vinh Dang, Michael Yang, Anzhong Chang +2 more | 2007-04-10 |
| 6734020 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Vinh Dang, Michael Yang, Anzhong Chang +2 more | 2004-05-11 |