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Method of forming storage node of capacitor in semiconductor memory, and structure therefore |
Je-Min Park |
2006-07-11 |
| 6927166 |
Method for manufacturing semiconductor devices and integrated circuit capacitors whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed |
Eun-Ae Chung, Cha-young Yoo |
2005-08-09 |
| 6815221 |
Method for manufacturing capacitor of semiconductor memory device controlling thermal budget |
Wan-don Kim, Cha-young Yoo, Jae Hyun Joo, Eun-Ae Chung, Yong-Kuk Jeong |
2004-11-09 |
| 6806183 |
Methods for forming capacitors on semiconductor substrates |
Chang-Seok Kang, Cha-young Yoo, Young-Wook Park, Hong-Bae Park |
2004-10-19 |
| 6683001 |
Method for manufacturing a semiconductor device whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed |
Eun-Ae Chung, Cha-young Yoo |
2004-01-27 |
| 6596186 |
Mask for the selective growth of a solid, a manufacturing method for the mask, and a method for selectively growing a solid using the mask |
Tetsuji Yasuda, Kazuyuki Ikuta, Satoshi Yamasaki, Kazunobu Tanaka |
2003-07-22 |
| 6472319 |
Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment |
Seok-Jun Won, Yun-Jung Lee, Soon-yeon Park, Cha-young Yoo, Eun-Ae Chung +1 more |
2002-10-29 |
| 6287699 |
Mask for the selective growth of a solid |
Tetsuji Yasuda, Kazuyuki Ikuta, Satoshi Yamasaki, Kazunobu Tanaka |
2001-09-11 |
| 6001660 |
Methods of forming integrated circuit capacitors using metal reflow techniques |
Young-soh Park, Sang In Lee, Cheol Seong Hwang, Hag-Ju Cho |
1999-12-14 |
