Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429780 | Multiple objectives metrology system, lithographic apparatus, and methods thereof | — | 2025-09-30 |
| 12292697 | Self-referencing interferometer and dual self-referencing interferometer devices | — | 2025-05-06 |
| 12287585 | Polarization selection metrology system, lithographic apparatus, and methods thereof | — | 2025-04-29 |
| 11126007 | Beam splitting prism systems | Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander K. Raub, Yevgeniy Konstantinovich Shmarev | 2021-09-21 |
| 10747010 | Beam splitting prism systems | Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander K. Raub, Yevgeniy Konstantinovich Shmarev | 2020-08-18 |