Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832953 | Technological method for preventing, by means of buried etch stop layers, the creation of vertical/lateral inhomogeneities when etching through-silicon vias | Matthias Wietstruck, Mehmet Kaynak, Philip Kulse, Marco Lisker, Steffen Marschmeyer | 2020-11-10 |
| 7595534 | Layers in substrate wafers | Bernd Heinemann, Karl-Ernst Ehwald, Dieter Knoll, Bernd Tillack, Peter Schley | 2009-09-29 |
| 7244667 | Method and device for the production of thin epitaxial semiconductor layers | Bernd Tillack, Georg Ritter, Thomas Grabolla | 2007-07-17 |
| 6465318 | Bipolar transistor and method for producing same | Karl-Ernst Ehwald, Bernd Tillack, Bernd Heinemann, Dieter Knoll | 2002-10-15 |