Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244667 | Method and device for the production of thin epitaxial semiconductor layers | Bernd Tillack, Dirk Wolansky, Thomas Grabolla | 2007-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244667 | Method and device for the production of thin epitaxial semiconductor layers | Bernd Tillack, Dirk Wolansky, Thomas Grabolla | 2007-07-17 |