Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832953 | Technological method for preventing, by means of buried etch stop layers, the creation of vertical/lateral inhomogeneities when etching through-silicon vias | Matthias Wietstruck, Mehmet Kaynak, Marco Lisker, Steffen Marschmeyer, Dirk Wolansky | 2020-11-10 |
| 9638617 | MEMS-microviscometer | Mario Birkholz, Jurgen Drews, Karl-Ernst Ehwald, Dieter Genschow, Ulrich Haak +5 more | 2017-05-02 |