Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383954 | Process gas distribution for forming stable fluorine-doped silicate glass and other films | Yaxin Wang, Turgut Sahin, Tetsuya Ishikawa, Farhad Moghadam | 2002-05-07 |