| 10903065 |
Halogen removal module and associated systems and methods |
Travis R. Taylor, Adam Bateman, Todd A. Lopes, Sankaranarayanan RAVI, Silvia Aguilar |
2021-01-26 |
| 10770339 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Austin Ngo |
2020-09-08 |
| 10427307 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Austin Ngo |
2019-10-01 |
| 10304717 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Austin Ngo |
2019-05-28 |
| 10297480 |
Buffer station with single exit-flow direction |
Martin Robert Maraschin, Richard H. Gould |
2019-05-21 |
| 10190865 |
Verifying end effector flatness using electrical continuity |
Silvia Rocio Aguilar Amaya, Damon Tyrone Genetti |
2019-01-29 |
| 10124492 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Austin Ngo |
2018-11-13 |
| 10062589 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Alex Paterson, Richard H. Gould, Austin Ngo +1 more |
2018-08-28 |
| 10062590 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Alex Paterson, Richard H. Gould, Austin Ngo +1 more |
2018-08-28 |
| 10062599 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Jon McChesney, Alex Paterson, Austin Ngo |
2018-08-28 |
| 9881826 |
Buffer station with single exit-flow direction |
Martin Robert Maraschin, Richard H. Gould |
2018-01-30 |
| 9881820 |
Front opening ring pod |
Scott Wong, Damon Tyrone Genetti, Alex Paterson, Richard H. Gould, Austin Ngo +1 more |
2018-01-30 |
| 9698036 |
Stacked wafer cassette loading system |
Silvia Aguilar, Scott Wong, Richard H. Gould, Candi Kristoffersen, Brandon Senn |
2017-07-04 |
